SEM electron microscope

Hitachi Tabletop Microscope

Magnification 15 to 30,000× (digital zoom: 2×, 4×)
Observation condition 5kV/15kV/Analysis
Observation mode Standard mode
Charge-up reduction mode
Image mode COMPO/Shadow 1/Shadow 2/TOPO
Sample stage traverse X: ±17.5mm, Y: ±17.5mm
Maximum sample size 70mm in diameter
Maximum sample height 50mm
Electron gun Pre-centered cartridge filament
Signal detection system High-sensitive semiconductor
BSE detector
Auto image
adjustment function
Auto start, Auto focus,
Auto brightness/contrast
Operation help functions Raster rotation, Magnification preset (two steps)
Image shift (±50μm@D*=4.5)
Frame memory 640 × 480 pixels, 1,280 × 960 pixels
Image data memory HDD of PC and other removal media
Image format BMP, TIFF, JPEG
Data display Micron marker, micron value, date and time,
image number and comments, Image mode,
Observation condition, D* (Distance), Observation mode
Evacuation system (vacuum pump) Turbomolecular pump: 30L/s × 1 unit, Diaphragm pump: 1m3/h × 1 unit
Safety device Over-current protection function, built-in ELCB
*D (Distance) is defined as the distance between lower surface of a high-sensitive semiconductor BSE detector and sample surface.



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